Model for the Voltage and Charge Actuations of Deformable Clamped- Clamped Beams in Presence of Dielectric Charging

 Using the SEM analysis technique, we present the first direct evidences of the non-uniform distribution of charges trapped in the dielectric layer during the actuation of electrostatic MEM devices. We highlight the importance of the contact quality to control the charge injection in the dielectric. We further incorporate the non-uniform charge distribution in a 2D model of the actuation of deformable clamped-clamped beams. In this framework, the precise charge distribution has an impact on the actuation of the device. Through voltage and charge actuation simulations, we demonstrate the possible asymmetry of the C-V characteristics of such devices.